Nano-Ingénierie
Nano-engineering
Description: Since the second half of the 20th century, the semiconductor industry has been engaged in an intense pursuit to reduce the size of circuit components. This miniaturization increases operating frequencies by shortening transit times, while also boosting component density, thereby multiplying computational capacity.
Laboratory work in cleanroom environments offers students hands-on experience with the key principles and constraints of semiconductor device fabrication. Particular attention is given to contamination control, including cleanroom protocols, proper gowning procedures, and the handling of sensitive substrates and equipment.
During these sessions, students are introduced to the main steps involved in micro- and nanofabrication, from pattern definition to material processing and device realization. They learn how to follow a complete process flow and to understand the role of each stage in the overall fabrication sequence, using equipment commonly found in research and semi-industrial cleanrooms.
The lab work also includes basic characterization activities, allowing students to evaluate the properties and quality of the fabricated structures. Emphasis is placed on observation, data interpretation, and critical analysis of results. Overall, these practical sessions aim to develop a clear understanding of the challenges associated with fabrication at small scales, including process variability, defect control, and reproducibility.
Bibliography:
- Ref. [1] : M. Köhler, W. Fritzsche, Nanotechnology: An Introduction to Nanostructuring Techniques, Wiley-VCH (2008)
Learning outcomes: AA1: Explain the fundamental principles of nanofabrication, including the techniques and processes used to create structures and devices at the nanometer scale – AA2: Master nanofabrication techniques – AA3: Design fabrication processes and integrate them into engineering projects – AA4: Collaborate within a research or development team involved in nanofabrication projects through experimental work.
Evaluated skills:
- Physical Engineering Design
- Systems Analysis
Course supervisor: Damien Rontani
Geode ID: SPM-PHY-022
